Regarding the Masters level degree with CS - I'd recommend getting one with a few caveats. First, you must want to go into industry. If you want to do research (read: cutting edge, so called "unconstrained" research), you need a PhD. But, a Masters in CS will almost automatically (at most places) get you a bump in salary and entry position. Quite good if you want to go into industry.

If you decide you want a Masters, I'd recommend doing it in another field (one that compliments your CS background). If you dig hardware, go the engineering route. If you are really into Math, get a Masters in math with a CS tilt (you could pick some research advisers out of both math and CS, I suppose). Or, if you really like Algorithms, Security, AI, or some other field, get a Masters in CS.

As with all thoughts about graduate school - figure out _what_ you want to do. Then figure out _who_ in the world is on the cutting edge. From there select your schools to apply to. Don't just apply to Berkeley or Stanford because they are "prestigious". There are plenty of areas such "prestigious" schools are severely lacking in. In graduate school, it is _who_ you work with (and ultimately publish with), not where you go that counts.

In either case - you have a plethora of options ahead of you. I'd consider them all, and see what best works for you :).