Comment Re:Looks tabletop to me... (Score 1) 38
I looked at this x-ray source. It's spectrally broad hard x-rays (8keV). Since x-ray mirrors (which suck worse that EUV mirrors) require spectrally narrow beams it would be very difficult to build any sort of projection lithography system with this. While Spectrum has no details I bet they are using a linac to make spectrally narrow soft x-ray beams (500ev or so). Making reticles and photoresists compatible with hard x-rays would require significant development.